| Digital Mass Flow Meter DMFM | ||
| S.No. | Parameter | Specification |
| 1 | Principle of Operation | Thermal mass flow meter |
| 2 | Measured Parameter | Mass Flow-rate |
| 3 | Engineering Units | SCCM |
| 4 | Process Gases | Argon, helium, and Air (The same DMFM should be able to measure argon, Helium & airflow rate) |
| 5 | Ambient conditions | 20°C – 40°C and up to 80% RH |
| 6 | Operating Flow rate | 0-100 SCCM for all the gases mentioned in Sr.No-3 |
| 7 | Operating Fluid Pressure | Up to 5 bar gauge |
| 8 | Operating Fluid Temperature | 20°C – 40°C |
| 9 | Burst Pressure | At least 1.5 times of Operating fluid pressure as mentioned |
| 10 | Flow Configuration | selectable/configurable using push-buttons / local interface |
| 11 | Zero Adjustment | Shall be adjustable |
| 12 | Display | Integrated digital display for a mass flow-rate indication with units |
| 13 | Input Power Supply | 230VAC, 50Hz (necessary power adapter, shall be provided by the vendor) |
| 14 | Calibrated Span | 0-100 SCCM for all the gases (Sr. No-3) |
| 15 | Measurement Accuracy | Within +1% of Calibrated Span including linearity for all the gases |
| 16 | Repeatability | Within +0.25% of Calibrated Span for all the gases |
| 17 | Signal Output | 4-20 mA DC/ 0-5V DC/ 1-5 V DC for measured mass flow rate |
| 18 | Process connection | 1/1/4” NPT or 1/4” BSP |
| 19 | The material of Construction for | Stainless Steel |
| 20 | Calibration Test Report | 5-point NIST traceable calibration report is required for the MDFM within the operating flow rate range |
| 21 | Leak Integrity | 1 x 10-8 atm cc/sec of Helium or better |
| 22 | Application software | Required to interface & configure the DMFM with Windows OS-compatible PC. Necessary interface cables shall be provided by the vendor. |
| 23 | Digital Communication | RS-232/485/LAN for configuration of flow meter using application software |